Equipment
- Deposition and short time annealing(1)
- Electrical characterisation(2)
- Optical characterisation(3)
- Magnetic Characterisation(4)
Deposition
Image | Description |
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Flash lamp annealing
Responsible: T. Schumann |
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Magnetron sputtering
Responsible: T. Schumann |
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Plasma enhanced chemical vapour deposition (PECVD)
Responsible: L. Rebohle |
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with FWIO: Atomic layer deposition (ALD)
Responsible: L. Rebohle (FWIM), T. Schönherr (FWIO) |
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Laser annealing: COMPexPRO 201
Responsible: S. Zhou |
Electrical characterisation
Image | Description |
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Hall effect measuring system HMS 9709A from LakeShore:Measurement of electrical transport parameters (resistance, charge carrier density and mobility) as a function of temperature and the magnetic field.
Responsible: S. Zhou |
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Resistance measurement
Responsible: T. Schumann |
Optical characterisation
Image | Description |
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Optical measurement setups
Responsible: S. Prucnal, L. Rebohle |
Magnetic Characterisation
Image | Description |
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Quantum Design: SQUID-VSMThe MPMS SQUID VSM system is a highly sensitive magnetometer system that combines the sensitivity of a SQUID (Superconducting Interference Device) with the higher speed of a VSM (Vibrating Sample Magnetometer). One can measure very weak magnetic signal, both temperature and field dependence.
Verantwortlich: S. Zhou |
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