Logo der WE-Heaeus-Stiftung537th Wilhelm and Else Heraeus Seminar

Physics of Ionized and Ion-Assisted PVD: Principles and Current Trends

June 26 - 28, 2013, Helmholtz-Zentrum Dresden-Rossendorf (26 - 27 June) and Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS (28 June), Dresden, Germany

Ionenstrahl auf Festkörperoberfläche

Program

The seminar will consist of tutorial and invited talks. In addition, in particular the young participants (PhD students and postdocs) are invited to present posters of their work. Please submit a short abstract when registering.

The seminar will start with arrival and registration on Tuesday, June 25, 2013 and will end on Friday, June 28, 2013 around noon.

Download program and abstracts (pdf)

Preliminary list of invited speakers

Basics of i(a)PVD

  • Wolfhard Möller (HZDR, Dresden) - Basics of ion-solid interactions
  • Andre Anders (Berkeley, USA) - Generation of high density plasmas
  • James Bradley (U. Liverpool, U.K.) - Plasma diagnostics in i-PVD
  • Jochen Schneider (RWTH, Aachen) - Basic processes in i(a)PVD

Ion Assisted Deposition

  • John Colligon (M.M.U., Manchester, U.K.) - Ion-assisted deposition
  • Bernd Rauschenbach (IOM, Leipzig) - Methods and application of low-energy ion assisted deposition
  • Klaus Ellmer (HZB, Berlin) - i(a)PVD of functional oxide materials
  • Vladimir Matias (iBeam Materials, USA) - IBAD of biaxially textured buffer layers

High Power Impulse Magnetron Sputtering

  • Ulf Helmersson (U. Linköping, Sweden) - HiPIMS discharges
  • Jaroslav Vlcek (U.W.B. Plzen, Czech Republic) - High-rate reactive deposition of oxide and oxynitride films using HiPIMS
  • Bernd Szyszka (TU Berlin / Fraunhofer-IST Braunschweig) - Applications of high-power impulse magnetron sputtering

Pulsed Laser Deposition

  • Ruben Hühne (IFW, Dresden) - Introduction to Pulsed Laser Deposition (PLD) as a versatile preparation method
  • Wilfrid Prellier (CRISMAT, CNRS, France) - Advances in oxide films and artificial heterostructures growth by PLD
  • Andrey Voevodin (Air Force Res. Lab., USA) - Hybrids of PLD with other PVD methods for Nanocomposite Film Growth

Arc-based methods

  • Marcela Bilek (Sydney, Australia) - Fundamentals of cathodic arc deposition
  • Andreas Leson (Fraunhofer-IWS, Dresden) - Application of pulsed filtered cathodic vacuum arc (PFCVA) deposition