Available Ion Species at the IBC Accelerators & Implanters

Following image depicts the ion species, which can be accelerated at our high-energy ion accelerators (2 MV, 3 MV, 6 MV) and at our ion implanters (40 kV, 200 kV, 500 kV). For most ion species isotopically separated ion beams can be provided on request; sometimes, special enriched ion source materials have to be obtained.

Besides monatomic also molecular ion beams (e.g. H2, N2, O2, SF, BF2) can be provided at our ion implanters. Please contact us, if you need more detailed information.

Deuterium ion beams are explicitly not provided at our ion beam center.

Verfügbare Ionenspezies am Ionenstrahlzentrum


Dr. Roman Böttger
Head Ion Implantation
Ion Technology
Phone: +49 351 260 - 2873