Contact

Dr. René Hübner
Electron Microscopy Laboratory
IBA/OSA
r.huebnerAthzdr.de
Phone: +49 351 260 - 3174
Fax: +49 351 260 - 13174

Analytical Transmission Electron Microscopy (TEM)


TEM FWIS

Equipment

Our Titan 80-300 manufactured by FEI company is equipped with a field emission gun working at accelerating voltages of 80 kV, 200 kV, and 300 kV, respectively. A 3-condensor lens setup is installed for extending the range of parallel illumination, and the image corrector from CEOS minimizes spherical aberration. An S-TWIN objective lens allows the use of the microscope for a wide range of applications. Moreover, the following additional components belong to the microscope:

  • High-Angle Annular Dark-Field Detector (HAADF) for Scanning Transmission Electron Microscopy (STEM)
  • Retractable detector for Energy Dispersive X-ray Spectroscopy (EDXS) from EDAX
  • Retractable 4 mega-pixel CCD camera (Gatan UltraScan 1000)
  • Imaging filter (Gatan Tridiem 863) containing a 4 mega-pixel CCD camera (Gatan UltraScan 1000) for Electron Energy Loss Spectroscopy (EELS) and Energy-Filtered TEM (EFTEM)
  • 2 low-background double-tilt holders, single-tilt holder, heating holder (1000 °C)

Performance characteristics:

  • Magnification (maximum at film height): TEM: 1.25 Mx; STEM: 330 Mx
  • Resolution: TEM: point resolution 0.10 nm, information limit < 0.1 nm, STEM: 0.136 nm; EDXS: 136 eV (MnK-alpha), detection of elements Z ≥ 5; EELS: 0.7 eV

Topics of research:

The TEM is mainly used for the investigation of the effects of ion implantation and layer deposition on the micro- and nano-scale. Due to the primary interest on depth profiles, cross-sectional specimens (XTEM) prepared in our own TEM laboratory are mainly analyzed. Besides classical TEM specimen preparation (sawing, grinding, polishing, dimpling, and Ar ion milling), target preparation can be done using a focused ion beam device (FIB, Zeiss NVision 40). The TEM is open for performing all relevant tasks at HZDR as well as to partners in academics and industry. Currently, contributions to the following topics are delivered:

  • Phase separation during simultaneous precipitation of metals and carbon
    e.g. morphology of transition metal nano-particles in a carbon matrix
  • Investigation of ZnO:Al layers produced by reactive sputtering
    e.g. influence of deposition temperature on structure and phase composition
  • Incorporation and binding of uranium in protozoan organisms (cooperation with Institute of Resource Ecology)
    e.g. localization of uranium in euglena cells

Contact

Dr. René Hübner
Electron Microscopy Laboratory
IBA/OSA
r.huebnerAthzdr.de
Phone: +49 351 260 - 3174
Fax: +49 351 260 - 13174