WORKSHOP “He-Ion Microscopy and its Applications”

9.12.2009, Forschungszentrum Dresden-Rossendorf

 

ORGANIZED BY:

Logo Zeiss SMT  Carl Zeiss SMT 

Carl Zeiss NTS GmbH
A Carl Zeiss SMT AG Company

Contact: Christian Jäger
Email: c.jaeger@smt.zeiss.com
Mobile: +49 (0)171 551 0753 ;  Fax : +49 (0)736 420 3226

and

Logo FZD

Forschungszentrum Dresden – Rossendorf e.V.

Contact: Johannes von Borany
Email: j.v.borany@hzdr.de
Phone: +49 (0)351 260 3378 ;  Fax: +49 (0)351 260 3438

 

Helium Ion Mikroskopie
Download Flyer

 

PROGRAM

10.30 h                    Visit of the Ion Beam Centre Dresden-Rossendorf

11.15 – 12.00 h       Welcome and Buffett

12.00 – 12.20 h       Prof. Wolfhard Möller; Forschungszentrum Dresden-Rossendorf e.V.
                                  Welcome Address
                                  Ion Beam Physics and Materials Research at FZD

INTRODUCTION

12.20 – 12.40 h      Dr. Rainer Knippelmeyer; CARL ZEISS SMT Inc. Peabody, USA
                                 ORION He-Ion Microscope – A New Tool for High-Resolution Material Analysis

12.40 – 13.10 h      Dr. Larry Scipioni; CARL ZEISS SMT Inc. Peabody, USA
                                 Overview of the Unique Application Space of He-Ion Microscopy

IMAGING

Preparation for the Remote Demo

13.20 – 13.50 h     Dr. Fabian Perez-Willard; CARL ZEISS SMT – NTS, Oberkochen
                                He-Ion Microscope: Web-Based Demonstration

13.50 - 14.10 h      Prof. Oleg Vyvenko; St. Petersburg State University, Russian Federation
                                He-Ion Microscope: Secondary Electron Energy Distribution and Application Examples                   

14.10 – 14.30 h     Dr. Ute Hörmann; Universität Ulm
                                He Ion Microscopy and Advanced TEM on High Performance Gas-Ionized Raney-type Nickel Catalysts

14.30 - 14.50 h      Dr. Lijuan Wang; Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden
                                He-Ion Microscope: A new Approach for Investigation of Semiconductor Nanostructures


- COFFEE BREAK -   (until 15.20 h)

 

15.20 – 15.40 h     Dr. Claus Burkhardt; Universität Tübingen
                                Investigations of Biological Samples with He-Ion Microscopy

15.40 – 16.00 h     Frank Altmann, Michel Simon; Fraunhofer Institut für Werkstoffmechanik, Halle
                                Evaluation of He-Ion Microscopy for Characterization of Microelectronic and Polymer Electronic Devices

ANALYTICS

16.00 – 16.20 h     Dr. Larry Scipioni; CARL ZEISS SMT Inc. Peabody, USA
                                ORION Spectra: Backscattered Helium Analysis

16.20 – 16.50 h     Prof. Robert A. Schwarzer; Herrenberg, Germany; formerly: TU Clausthal-Zellerfeld
                                Ion Blocking Patterns and Orientation Microscopy

LITHOGRAPHY

16.50 – 17.20 h     Dr. Diederik Maas, TNO Science and Industry Delft, The Netherlands
                                Nano-Fabrication with the He-Ion Microscope at the TNO NanoLab

 

OPEN DISCUSSION / OUTLOOK

 

 

 

How to find us

Applikationslabor Ionentechnologie

(Co-Organizer)