Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378

Technology & end stations for ion irradiation

Quick overview

Available ions

High-energy ion implantation

Ion implantation

Plasma-based ion implantation

Dual-beam ion implantation

FAQ