Contact

Dr. Kay Potzger
Head Interface Magnetism
Project-group head
k.potzgerAthzdr.de
Phone: +49 351 260 - 3244, 2411
Fax: +49 351 260 - 13244

Experimentelle Ausrüstung

Schichtabschneidung

Magnetormetrie

Thin Film Deposition

Bild Beschreibung
 K1 Sputterchamber

K1: sputter chamber for metal and oxide/nitride thin films

  • 2" targets
  • temperature range: RT - 1100 °C
  • gas control: 0.1 - 200 sccm
  • base pressure: <1e-7 mbar
  • sample size: up to 50 x 50 mm²

Responsible: K. Potzger

Neue MBE+FIB Kammer

ALDI: apparatus for layer deposition and interfaces

  • Manufacturer: Createc
  • MBE:
    • 5 pocket e-beam evaporator
    • 4 Knudsen cells
    • EFM3 evaporator
  • Ion source: Model Kremer IQ100
  • Plasma source
  • LEED
  • AES
  • sample size 10 x 10 mm²

Responsible: K. Potzger

 Sputnik Chamber

Sputnik: sputter chamber

  • sample size 10 x 10 mm²
  • temperature range: RT - 1000 °C
  • 2 targets
  • base pressure 1e-10 mbar
  • sputter pressure 3e-3 mbar at 43 sccm Argon

Responsible: K. Potzger


Contact

Dr. Kay Potzger
Head Interface Magnetism
Project-group head
k.potzgerAthzdr.de
Phone: +49 351 260 - 3244, 2411
Fax: +49 351 260 - 13244