Contact

Dr. Axel Renno
Group Leader Ion Beam Analysis 
Phone: +49 351 260 - 3274

Eye catcher

 

Ion microprobe

 

Lateral element distributions or depth profiles in lateral resolution of some µm's using

  • Particle-Induced X-ray Emission (PIXE)
  • Particle-Induced Gamma-ray Emission (PIGE)
  • Rutherford Backscattering Spectrometry (RBS) & RBS/Channeling
  • Elastic Recoil Detection (ERD)
  • Nuclear Reaction Analysis (NRA)

Quantitative and standardfree method with a relative accuracy of < 5%

Typical parameters:

  • Lateral resolution:
    > 3 x 3 µm2
    10 x 10 µm2 (channeling)
  • Scanning area: < some mm2
  • Detection limits:
    • 0.2 atom-% (for H & B-F)
    • > 0.001 atom-% (for Al - U)
  • Analysing depth (max.): 1 - 5 µm (matrix-dependent)
  • Depth resolution: ~ 20 nm (at the surface)

For further information, please contact Frans Munnik or Axel Renno.