Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378

Technology & end stations for ion irradiation

Quick overview

Available ions

High-energy ion implantation

Ion implantation

Plasma-based ion implantation

Dual-beam ion implantation

FAQ

High-Energy Ion Accelerators

The IBC operates three high-energy electrostatic accelerators with about 20 endstations for experiments dedicated to ion beam modification or analysis.

6 MV Tandetron

Der Beschleuniger im Ionenstrahlzentrum Manufacturer: High Voltage Engineering Europa B.V. (HVEE)
Type: Tandem, high-voltage cascade (Dynamitron)
Terminal voltage: 0.3 - 6 MV
Ion sources: Duoplasmatron Model 358 with Li charge exchange channel
Cs sputter source Model IONEX 860C
AMS Cs sputter source SO-110
Duoplasmatron EKTON
Multicusp gas source with Rb charge exchange channel
Energy range: about 0.6 - 50 MeV
(depending on available ion charge states)
Ion currents: 0.001 - 100 µA
Endstations: 12
Applications: High-energy ion implantation; Ion irradiation
Ion beam analysis (IBA) 
Accelerator mass spectrometry (AMS)
Nuclear- and astrophysics
Optics development for laser-accelerated ions

3 MV Tandetron 

3 MV Tandetron Manufacturer: High Voltage Engineering Europa B.V. (HVEE)
Type: Tandem, High-voltage cascade (Dynamitron)
Terminal voltage: 0.15 - 3 MV
Ion sources: Duoplasmatron Model 358 with Li charge exchange channel
Cs sputter source Model IONEX 860C
TORVIS (NEC) He ion source with Rb charge exchange channel
Energy range: about 0.3 - 20 MeV
(depending on available ion charge states)
Ion currents: 0.001 - 100 µA
Endstations: 6
Applications: High-energy ion implantation; Ion irradiation
Ion beam analysis (IBA) 
Nuclear- and Astrophysics
Double beam experiments (combination with ion implanter)

2 MV Van-de-Graaff

van-de-Graaf Manufacturer: Transformatoren- und Röntgenwerk Dresden
Type: Van-de-Graaff Bandgenerator
Terminal voltage: 0.4 - 1.8 MV
Ion sources: rf ion source for H, He
Energy range: 0.4 - 1.8 MeV 
Ion currents: 0.001 - 1 µA
Endstations: 2
Applications: Ion beam analysis (IBA)
Ionoluminescence

Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378