Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378

IBC Overview - Methods & Instrumentation

The ion beam center (IBC) at HZDR combines various machines (electrostatic accelerators, ion implanters, other ion- and plasma-based equipment) into an unique facility mainly used for ion beam modification and ion beam analysis of materials. The available energy range varies from 10 eV to almost 100 MeV with a respective interaction depth in solids between 0.1 nm and 10 µm. In addition to standard broad beams also focused (down to 1 nm) and highly-charged (charge state up to 45+) ions are provided.

A schematic overview of the IBC is shown on the following figure:

IBC overview 2014

Experimental stations offered for user access are indicated by numbers in the floor plan. More details about the various techniques available at these endstations are given in the table below. For technical details please contact the responsible scientist or have a look at the correspondig equipment pages.

Experiment
Category
Application / Method GATE
Beamline
Acronym Machine Endstation(s) Local
Contact

Ion Beam
Modification

Ion Implantation Ion Implantation / Irradiation II 40 kV Implanter 21 R. Böttger
200 kV Implanter 22, 23
500 kV Implanter 24, 25, 26, 27
3 MV Tandem 14 S. Akhmadaliev
3 MV Tandem 12, 24
6 MV Tandem 3, B1
Double-Beam Experiments Double-Beam Experiments DBE 500 kV / 3 MV 24
Plasma-Based Ion Implantation Plasma-Based Ion Implantation PBII Various \ R. Böttger
Ga FIB FIB Experiments FIB NVision 40 F1 S. Facsko
Mass-Separated FIB FIB IMSA-100 F2
He / Ne Ion Microscope IM ORION NanoFab F3
Low-Energy Ion Irradiation LEI/HCI Experiments LEI Various \
Highly-Charged Ion Experiments HCI Double-Source Facility 15
Ion Beam
Analysis
RBS-Standard-RBS + Channelling Ion Beam Analysis RBS/C 2 MV van de Graaff A1 R. Heller
Heavy-Ion RBS HI-RBS 3 MV Tandem 11
High-Resolution RBS HR-RBS 28
Analytical Ion Microprobe Analytical Ion Microprobe IMP 14
Nuclear Reaction Analysis Ion Beam Analysis NRA 3 / 6 MV Tandem 1, 11
Elastic Recoil Detection Analysis ERDA 6 MV Tandem 2
in-situ IBA ISIBA 9
External Proton Beam External Proton Beam ExtB 5
High-Speed PIXE High-Speed PIXE HS-PIXE 4 A. Renno
Accelerator Mass Spectrometry Accelerator Mass Spectrometry AMS B2 S. Merchel

Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378