Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378

Technology & end stations for ion irradiation

Quick overview

Available ions

High-energy ion implantation

Ion implantation

Plasma-based ion implantation

Dual-beam ion implantation

FAQ

Ion Technology - Recent Publications

Here, one can find recent publications, which resulted from user experiments in or collaborations with the project group ion technology.

2016

  • Gan'shina, E.; Golik L.; Kun'kova, Z.; Bykov, I.; Novikov, A. , Rukovishnikov, A.; Yuan, Y.; Zykov, G.; Böttger, R.; Zhou, S.; Transversal Kerr effect of In1−x MnxAs layers prepared by ion implantation followed by pulsed laser annealing; Jap. J. Appl. Phys. 55, 07MF02 (2016) [doi:10.7567/JJAP.55.07MF02]
  • Cheng, Y.; Lv, J.; Akhmadaliev, S.; Zhou, S.; Chen, F.; Optical ridge waveguides in Nd:LGS crystal produced by combination of swift C5+ ion irradiation and precise diamond blade dicing; Opt. Las. Tec. 81, 122 (2016) [doi:10.1016/j.optlastec.2016.02.009]
  • Reinhardt, T. P.; Akhmadaliev, S.; Bemmerer, D.; Stöckel, K.; Wagner, L.; Absolute hydrogen depth profiling using the resonant 1H(15N,αγ)12C nuclear reaction; Nucl. Instr. Meth. Phys. Res. B 381, 58 (2016) [doi:10.1016/j.nimb.2016.05.009]
  • Liu, F.; Prucnal, S.; Hübner, R.; Yuan, Y.; Skorupa, W.; Helm, M.; Zhou, S.; Suppressing the cellular breakdown in silicon supersaturated with titanium; J. Appl. Phys. D 49, 245104 (2016) [doi:10.1088/0022-3727/49/24/245104]
  • Tan, Y.; Chen, L.; Wang, D.; Chen, Y.; Akhmadaliev, S.; Zhou, S.; Hong, M.; Chen, F.; Tunable Picosecond Laser Pulses via the Contrast of Two Reverse Saturable Absorption Phases in a Waveguide Platform; Sci. Rep. 6, 26176 (2016) [doi:10.1038/srep26176]
  • Li, R.; Nie, W.; Shang, Z.; Cheng, C.; Akhmadaliev, S.; Zhou, S.; Lu, Q.; Chen, F.; Guided-wave second harmonics in Nd:YCOB ridge waveguides produced by combination of carbon ion irradiation and precise diamond blade dicing; Opt. Mat. 57, 153 (2016) [doi:10.1016/j.optmat.2016.04.043]
  • Amekura, H.; Akhmadaliev, S.; Zhou, S.; Chen, F.; A possible new origin of long absorption tail in Nd-doped yttrium aluminum garnet induced by 15 MeV gold-ion irradiation and heat treatment; J. Appl. Phys. 119, 173104 (2016) [doi:10.1063/1.4948348]
  • Berova, M.; Sandulov, M.; Tsvetkova, T.; Karashanova, D.; Böttger, R.; Bischoff, L.; Structural modification of Ga+ and N+ ion implanted ta-C films; J. Phys.: Conf. Ser. 700, 12035 (2016) [doi:10.1088/1742-6596/700/1/012035]   
  • Lorinčík, J.; Veselá, D.; Vytykáčová, S.; Švecová, B.; Nekvindová, P.; Macková, A.; Mikšová, R.; Malinský, P.; Böttger, R.; Comparison of SIMS and RBS for depth profiling of silica glasses implanted with metal ions; J. Vac. Sci. Technol. B 34, 03H129 (2016) [doi:10.1116/1.4944525]
  • Berova, M.; Sandulov, M.; Tsvetkova, T.; Bischoff, L.; Böttger, R.; Abrashev, M.; Vibrational spectroscopy of Ga+ ion implanted ta-C films; J. Phys.: Conf. Ser. 682, 012020 (2016) [doi:10.1088/1742-6596/682/1/012020]
  • Tan, Y.; Guo, Z.; Shang, Z.; Liu, F.; Böttger, R.; Zhou, S.; Shao, J.; Yu, X.; Zhang, H.; Chen, F.; Tailoring nonlinear optical properties of Bi2Se3 through ion irradiation; Sci. Rep. 6, 21799 (2016) [doi:10.1038/srep21799]
  • Pan, X.; Shuai, Y.; Wu, C.; Luo, W.; Sun, X.; Zeng, H.; Zhou, S.; Böttger, R.; Ou, X.; Mikolajick, T.; Zhang, W.; Schmidt, H.; Rectifying filamentary resistive switching in ion-exfoliated LiNbO3 thin films; Appl. Phys. Lett. 108, 032904 (10216) [doi:10.1063/1.4940372]
  • Vytykacova, S.; Svecova, B.; Nekvindova, P.; Spirkova, J.; Mackova, A.; Miksova, R.; Böttger, R.; The formation of silver metal nanoparticles by ion implantation in silicate glasses; Nucl. Instr. Meth. Phys. Res. B 371, 245 (2016) [doi:10.1016/j.nimb.2015.10.016]
  • Macková, A.; Malinský, P.; Sofer, Z.; Šimek, P.; Sedmidubský, D.; Veselý, M.; Böttger, R.; The structural and optical properties of metal ion-implanted GaN; Nucl. Instr. Meth. Phys. Res. B 371, 254 (2016) [doi:10.1016/j.nimb.2015.10.015]
  • Wutzler, R.; Rebohle, L.; Prucnal, S.; Hübner, R.; Facsko, S.; Böttger, R.; Helm, M.; Skorupa, W.; III-V nanocrystal formation in ion-implanted Ge and Si via liquid phase epitaxy during short-time flash lamp annealing; Mat. Sci. Semicon. Proc. 42, 166 (2016) [doi:10.1016/j.mssp.2015.07.075]
  • Dell’Anna, R.; Giubertoni, D.; Iacob, E.; Demenev, E.; Secchi, M.; Böttger, R.; Pepponi, G.; Nanofabrication of self-organized periodic ripples by ion beam sputtering; Microelectron. Eng. 155, 50 (2016) [doi:10.1016/j.mee.2016.02.025]
  • Tan, Y.; Ma, L.; Akhmadaliev, Sh.; Zhou, S.; Chen, F.; Ion irradiated Er:YAG ceramic cladding waveguide amplifier in C and L bands; Opt. Mat. Express 6, 711 (2016) [doi:10.1364/OME.6.000711]
  • Tan, Y.; Guo, Z.; Ma, L.; Zhang, H.; Akhmadaliev, Sh.; Zhou, S.; Chen, F.; Q-switched waveguide laser based on two-dimensional semiconducting materials: tungsten disulfide and black phosphorous; Opt. Express 24, 2858 (2016) [doi:10.1364/OE.24.002858]
  • Liu, G.; Dong, N.; Wang, J.; Akhmadaliev, Sh.; Zhou, S.; Chen, F.; Optical waveguides in Yb:SBN crystals fabricated by swift C ion irradiation; Opt. Mat. 51, 31 (2016) [doi:10.1016/j.optmat.2015.11.019]
  • Chen, C.; He, R.; Tan, Y.; Wang, B.; Akhmadaliev, Sh.; Zhou, S.; de Aldana, J. R. V.; Hu, L.; Chen, F.; Optical ridge waveguides in Er3+/Yb3+ co-doped phosphate glass produced by ion irradiation combined with femtosecond laser ablation for guided-wave green and red upconversion emissions; Opt. Mat. 51, 185 (2016) [doi:10.1016/j.optmat.2015.11.042]
  • Rugel, G.; Pavetich, S.; Akhmadaliev, S.; Enamorado Baez, S. M.; Scharf, A.; Ziegenrücker, R.; Merchel, S.; The first four years of the AMS-facility DREAMS: Status and developments for more accurate radionuclide data; Nucl. Instr. Meth. Phys. Res. B 370, 94 (2016) [doi:10.1016/j.nimb.2016.01.012]
  • Heintze, C.; Bergner, F.; Akhmadaliev, Sh.; Altstadt, E.; Ion irradiation combined with nanoindentation as a screening test procedure for irradiation hardening; J. Nucl. Mat. 472, 196 (2016) [doi:10.1016/j.jnucmat.2015.07.023]
  • Bemmerer, D.; Akhmadaliev, S.; Al-Abdullah, T.; Anders, M.; Cowan, T. E.; Elekes, Z.; Junghans, A. R.; Gohl, S.; Krause, J.; Reinhardt, T. P.; Reinicke, S.; Rimarzig, B.; Röder, M.; Schmidt, K.; Schwengner, R.; Szücs, T.; Takács, M.; Wagner, A.; Wagner, L.; Wielicki, J.; Zuber, K.; Program and status for the planned underground accelerator in the Dresden Felsenkeller; J. Phys.: Conf. Ser. 665, 012030 (2016) [doi:10.1088/1742-6596/665/1/012030]
  • Heintze, C.; Bergner, F.; Hernandez-Mayoral, M.; Kögler, R.; Müller, G.; Ulbricht, A.; Irradiation hardening of Fe-9Cr-based alloys and ODS Eurofer: effect of helium implantation and iron-ion irradiation at 300 °C including sequence effects; J. Nucl. Mat. 470, 258 (2016) [doi:10.1016/j.jnucmat.2015.12.041]

2015

  • Csato, C.; Krippendorf, F.; Akhmadaliev, Sh.; von Borany, J.; Han, W.; Siefke, T.; Zowalla, A.; Rüb, M.; Energy filter for tailoring depth profiles in semiconductor doping application; Nucl. Instr. Meth. Phys. Res. B 365, 182 (2015) [doi:10.1016/j.nimb.2015.07.102]
  • Depalo, R.; Cavanna, F.; Ferraro, F.; Slemer, A.; Al-Abdullah, T.; Akhmadaliev, Sh.; Anders, M.; Bemmerer, D.; Elekes, Z.; Mattei, G.; Reinicke, S.; Schmidt, K.; Scian, C.; Wagner, L.; Strengths of the resonances at 436, 479, 639, 661, and 1279 keV in the 22Ne(p,γ)23Na reaction; Phys. Rev. C 92, 045807 (2015) [doi:10.1103/PhysRevC.92.045807]
  • Shang, Z.; Tan, Y.; Akhmadaliev, Sh.; Zhou, S.; Chen, F.; Cladding-like waveguide structure in Nd:YAG crystal fabricated by multiple ion irradiation for enhanced waveguide lasing; Opt. Express 21, 27612 (2015) [doi:10.1364/OE.23.027612]
  • Lederer, S.; Akhmadaliev, Sh.; Forck, P.; Gütlich, E.; Lieberwirth, A.; Ensinger, W.; Thermal annealing behavior of α-Al2O3 scintillation screens; Nucl. Instr. Meth. Phys. Res. B 365, 548 (2015) [doi:10.1016/j.nimb.2015.08.024]
  • Lederer, S.; Akhmadaliev, Sh.; von Borany, J.; Gütlich, E.; Lieberwirth, A.; Zimmermann, J.; Ensinger, W.; High-temperature scintillation of alumina under 32 MeV 63Cu5+ heavy-ion irradiation; Nucl. Instr. Meth. Phys. Res. B 359, 161 (2015) [doi:10.1016/j.nimb.2015.07.131]
  • Cheng, Y.; Lv, J.; Akhmadaliev, Sh.; Zhou, S.; Kong, Y.; Chen, F.; Mid-infrared ridge waveguide in MgO:LiNbO3 crystal produced by combination of swift O5+ ion irradiation and precise diamond blade dicing; Opt. Mat. 48, 209 (2015) [doi:10.1016/j.optmat.2015.08.003]
  • Cheng, Y.; Lv, J.; Akhmadaliev, Sh.; Hernández-Palmero, I.; Romero, C.; Vázquez De Aldana, J. R.; Zhou, S.; Chen, F.; Optical ridge waveguides in Yb:YAG laser crystal produced by combination of swift carbon ion irradiation and femtosecond laser ablation; Opt. Laser Technol. 72, 100 (2015) [doi:10.1016/j.optlastec.2015.03.018]
  • Tan, Y.; Zhang, H.; Zhao, C.; Akhmadaliev, Sh.; Zhou, S.; Chen, F.; Bi2Se3Q-switched Nd:YAG ceramic waveguide laser; Opt. Lett. 40, 637 (2015) [doi:10.1364/OL.40.000637]
  • Luan, Q.; Tan, Y.; Akhmadaliev, Sh.; Zhou, S.; Yu, H.; Zhang, H.; Chen, F.; Optical ridge waveguides in Nd:CNGG disorder laser crystal produced by combination of carbon ion irradiation and precise diamond blade dicing; Opt. Mat. 39, 247 (2015) [doi:10.1016/j.optmat.2014.11.035]
  • Chen, C.; Luan, Q.; He, R.; Cheng, C.; Akhmadaliev, Sh.; Zhou, S.; Yu, H.; Zhang, H.; Chen, F.; Ridge waveguides in Nd:ABC3O7 disordered crystals produced by swift C5+ ion irradiation and precise diamond dicing: Broad band guidance and spectroscopic properties; Opt. Laser Technol. 68, 84 (2015) [doi:10.1016/j.optlastec.2014.11.017]
  • Bacco, D.; Corso, A. J.; Zuppella, P.; Böttger, R.; Gerlin, F.; Napolitani, E.; Tessarolo, E.; Nardello, M.; Pelizzo, M. G.; Study of solar wind ions implantation effects in optical coatings in view of Solar Orbiter space mission operation; Proc. SPIE 9604, 960407 (2015) [doi:10.1117/12.2190607]
  • Yildirim, O.; Cornelius, S.; Butterling, M.; Anwand, W.; Wagner, A.; Smekhova, A.; Fiedler, J.; Böttger, R.; Bähtz, C.; Potzger, K.; From a non-magnet to a ferromagnet: Mn implantation into different TiO2 structures; Appl. Phys. Lett. 107, 242405-1 (2015) [doi:10.1063/1.4938069]
  • Bacco, D.; Corso, A. J.; Zuppella, P.; Gerlin, F.; Böttger, R.; Napolitani, E.; Tessarolo, E.; Nardello, M.; Zuccon, S.; Pelizzo, M. G.; He+ ions damage on optical coatings for solar missions; Proc. SPIE 9510, 95100B (2015) [doi:10.1117/12.2178496]
  • Zatsepin, A. F.; Buntov, E. A.-; Mikhailovich, A. P.; Slesarev, A. I.; Schmidt, B.; von Czarnowski, A.; Fitting, H. J.; Relaxation of excited surface states of thin Ge-implanted silica films probed by OSEE spectroscopy; J. Lumin. 169, 143 (2015) [doi:10.1016/j.jlumin.2015.08.073]
  • Prucnal, S.; Gao, K.; Skorupa, I.; Rebohle, L.; Vines, L.; Schmidt, H.; Khalid, M.; Wang, Y.; Weschke, E.; Skorupa, W.; Grenzer, J.; Hübner, R.; Helm, M.; Zhou, S.; Band-gap narrowing in Mn-doped GaAs probed by room-temperature photoluminescence; Phys. Rev. B 92, 224407 (2015) [doi:10.1103/PhysRevB.92.224407]
  • Radek, M.; Bracht, H.; Johnson, B. C.; McCallum, J. C.; Posselt, M.; Liedke, B.; Atomic transport during solid-phase epitaxial recrystallization of amorphous germanium; Appl. Phys. Lett. 107, 082112 (2015) [doi:10.1063/1.4929839]
  • Wierzchowski, W.; Turos, A.; Wieteska, K.; Stonert, A.; Ratajczak, R.; Jóźwik, P.; Wilhelm, R.; Akhmadaliev, S.; Mazur, K.; Paulmann, C.; Ion implantation of the 4H SiC epitaxial layers and substrates with 2MeV Se+ and 1MeV Al+ ions; X-Ray Spectrom. 44, 371 (2015) [doi:10.1002/xrs.2642]
  • Nekvindova, P.; Mackova, A.; Malinsky, P.; Cajzl, J.; Svecova, B.; Oswald, J.; Wilhelm, R. A.; Erbium-ion implantation into various crystallographic cuts of Al2O3; Nucl. Instr. Meth. Phys. Res. B 365, 89 (2015) [doi:10.1016/j.nimb.2015.07.024]
  • Zatsepin, A. F.; Zatsepin, D. A.; Zhidkov, I. S.; Kurmaev, E. Z.; Fitting, H. J.; Schmidt, B.; Mikhailovich, A. P.; Lawniczak-Jablonska, K.; Formation of Ge-0 and GeOx nanoclusters in Ge+-implanted SiO2/Sithin-film heterostructures under rapid thermal annealing; Appl. Surf. Sci. 349, 780 (2015) [doi:10.1016/j.apsusc.2015.05.090]
  • Yuan, Y.; Wang, Y.; Gao, K.; Khalid, M.; Wu, C.; Zhang, W.; Munnik, F.; Weschke, E.; Baehtz, C.; Skorupa, W.; Helm, M.; Zhou, S.; High Curie temperature and perpendicular magnetic anisotropy in homoepitaxial InMnAs films; J. Phys. D.: Appl. Phys. 48, 235002 (2015) [doi:10.1088/0022-3727/48/23/235002]
  • Wutzler, R.; Rebohle, L.; Prucnal, S.; Bregolin, F.; Hübner, R.; Voelskow, M.; Helm, M.; Skorupa, W.; Liquid phase epitaxy of binary III-V nanocrystals in thin Si layers triggered by ion implantation and flash lamp annealing; J. Appl. Phys. 117, 175307 (2015) [doi:10.1063/1.4919775]

Contact

Dr. Johannes von Borany
Head of Ion Beam Center
j.v.boranyAthzdr.de
Phone: +49 351 260 - 3378
Fax: +49 351 260 - 13378