Ion Implanters: High speeds at high currents

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Title Ion Implanters: High speeds at high currents
Description A new ion implanter has been in operation at the HZDR since 2016. The facility with four experimental stations increases the attractiveness of the Ion Beam Center for research and industry as a supraregional center for ion beam applications.
Copyright HZDR/Oliver Killig
Picture Id 48616
Date 16.11.2015
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