High-frequency measurements of thermophysical properties of thin films using a modified broad-band frequency domain thermoreflectance approach


High-frequency measurements of thermophysical properties of thin films using a modified broad-band frequency domain thermoreflectance approach

Shahzadeh, M.; Rahman, M.; Hellwig, O.; Pisana, S.

In this work, we present the implementation of a new method to perform high-frequency thermoreflectance measurements on thin films. The so-called differential broad-band frequency domain thermoreflectance method follows broad-band frequency domain thermoreflectance developed previously [Regner et al., Rev. Sci. Instrum. 84 (6), 064901 (2013)], without the use of expensive electro-optic modulators. Two techniques are introduced to recover the thermal phase of interestand to separate it from the unwanted instrumental contributions to the recorded phase. Measuring a differential thermal phase by either varying the spot size or offsetting the pump and probe beams, the thermophysical properties of materials can be extracted. This approach enables the study of nanoscale heat transport where non-equilibrium phenomena are dominating.

Keywords: Thin films; Materials properties; Thermal conductivity; Optical metrology; Frequency domain thermoreflectance

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Publ.-Id: 28068