A route to epitaxial growth of periodic metal nanostructure arrays


A route to epitaxial growth of periodic metal nanostructure arrays

Erb, D.; Malsch, G.; Hübner, R.; Lenz, K.; Lindner, J.; Facsko, S.; Helm, M.; Fassbender, J.

Epitaxial thin film growth on planar substrate surfaces is well-established for many materials. We present a novel bottom-up approach showing that it can also be feasible to grow nanostructures in an oriented manner on nanopatterned crystalline surfaces. Produced by a scalable procedure on large surface areas, such nanostructure arrays may find diverse applications in research and technology, e.g. in the fields of magnetism or catalysis.
On semiconductor substrates, nanoscale surface patterns with well-defined lateral periodicity form under low-energy ion irradiation via non-equilibrium self-assembly of vacancies and ad-atoms [1]. For appropriate process temperatures, the crystallinity of the substrate is retained during ion irradiation. When a material is then deposited onto the substrate by PVD under non-normal incidence, shadowing effects give rise to the formation of separated nanostructures [2], while a suitable lattice matching can induce epitaxial growth.
In this contribution, we outline the patterning and growth procedure. As an example, we will present periodic Fe/Au nanostructure arrays and discuss their strongly anisotropic optical and magnetic properties.

[1] X. Ou, K.-H. Heinig, R. Hübner, J. Grenzer, X. Wang, M. Helm, J. Fassbender,
S. Facsko, Nanoscale 7, 18928 (2015)
[2] Q. Jia, X. Ou, M. Langer, B. Schreiber, J. Grenzer, P. F. Siles, R. D. Rodriguez,
K. Huang, Y. Yuan, A. Heidarian, R. Hübner, T. You, W. Yu, K. Lenz, J. Lindner,
X. Wang, and S. Facsko, Nano Research 15, 1 (2017)

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