4th International Workshop on High-Resolution Depth Profiling
Radebeul, Germany, June 17th - 21th , 2007



Conference Program:

JUNE 17th(Sunday)
19.00 Get together  
JUNE 18th(Monday)
9.00 - 9.30 OPENING
Session A, Chair: T.Gustafsson
9.30 – 10.15 Structural Characterization of Advanced CMOS Technology
M. Copel and R. Pezzi
10.15 – 11.00 The Effect of Strain on Interfacial Structures of Gate Dielectrics and Q-dots
Dae Won Moon and Man-Ho Cho
11.00 - 11.30>  COFFEE BREAK  
Session B, Chair: L.Goncharova  
11.30 – 12.00 Quantitative (?) analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBS.  
W.Vandervorst, T.Conard, S.Giangandri, B,Brijs, A.Bergmaier, G.Dollinger,K.Kimura,J.A.Vandenberg and M.Werner  
12.00 – 12.30 MEIS as a probe of alloying, sintering and adsorbate induced segregation behaviour of supported bimetallic nanoparticles  
R Haire, J. Gustafson, T. E. Jones, T. G. Owens, A.G. Trant, C. J. Baddeley,T. C. Q. Noakes and P Bailey  
12.30 – 14.00  LUNCH  
Session C, Chair: Y.Kido  
14.00 – 14.45 An Introduction to the Helium Ion Microscope  
  John Notte, Bill Ward and Nick Economou  
14.45 – 15.15 Quantitative analysis of Au growth on B/Si by TOF-LEIS  
  S. Prusa, D. Primetzhofer, M. Kolibal, S.N. Markin, T. Sikola, P. Zeppenfeld and P. Bauer  
15.15 – 15.45  COFFEE BREAK  
Session D, Chair: P.Bailey  
15.45 – 16.30 An analytical energy-loss line shape for high depth resolution in ion-beam analysis   
  P.L Grande*, A. Hentz*, R.P. Pezzi*, I.J.R. Baumvol* and G. Schiwietz#  
16.30 – 17.00 The analysis of ultra-thin films with a magnetic spectrometer in combination with conventional RBS  
  B. Brijs1, K. Kimura2, S. Giangrandi1,3, T. Sajavaara1,4, A. Vantomme4, W. Vandervorst1,3,   
     
JUNE 19th (Tuesday)  
Session E, Chair: J. O´Connor  
9.00 – 9.45 A Medium Energy Ion Scattering simulation model for the extraction of the atomic concentration depth profiles of ultra shallow layers from energy spectra
  Paul Bailey, Tim Noakes, Jaap van den Berg,  Micheal Reading, Matt Werner, Thierry Conard, and Wilfried Vandervorst    
9.45 – 10.30 Gate metal-induced diffusion and interface reactions in metal oxide dielectrics  
  L.V. Goncharova, M. Dalponte, E. Garfunkel, T. Gustafsson  
10.30 – 11.00  COFFEE BREAK  
Session F, Chair: K.Kimura  
11.00 – 11.45 Non-equilibrium Charge States and Scattering Potentials in Ion-Solid Interactions  
  G. Schiwietz and P.L. Grande  
11.45 – 12.30 High Resolution ERD Channeling  
  Andreas Bergmaier and Günther Dollinger  
12.30 – 14.00  LUNCH  
14.00 EXCURSION TO MEISSEN  
     
JUNE 20th (Wednesday)  
Session G, Chair: M.Copel  
9.00 – 9.45 Surface structural studies with MEIS  
  D.P. Woodruff,  G.S. Parkinson, A.J. Window and D.C. Sheppard  
9.45 – 10.30 The structure of 2- and 3-dimensional rare earth silicides on silicon (111) studied by MEIS  
  S. P. Tear  
10.30 – 11.00  COFFEE BREAK  
Session H, Chair: P.Woodruff  
11.00 – 11.45 Characterising nanostructured materials using MEIS
T.C.Q. Noakes and P. Bailey
11.45 – 12.30 Au Nano-particles Grown on Oxide Substrates  
  Yoshiaki Kido and Tetsuaki Okazawa  
12.30 – 14.00  LUNCH  
Session I, Chair : G. Schiwietz  
14.00 – 14.45 Interatomic potentials at surfaces from rainbow scattering and atom diffraction  
  A. Schüller, H. Winter and K.Gärtner  
14.45 – 15.15 Depth resolution optimization and role of multiple scattering in low-energy TOF-ERDA  
  Simone Giangrandi, B. Brijs, K. Arstila, T. Sajavaara, A. Vantomme and W.Vandervorst  
15.15 – 15.45  COFFEE BREAK  
Session J; Chair : D.W.Moon  
15.45 – 16.30 Analysis of nanostructures by using 3D-MEIS
  Takane Kobayashi, Christopher Bonet, Steve P. Tear , Shoichi Mure, Masaaki Maehara and Takashi Sato  
16.30 – 17.00 The use of ion beam analysis on the investigation of alternative metal-oxide-semiconductor structures  
  L.Miotti and I.J.R.Baumvol  
17.00 – 18.00 Poster Session  
18.30 Coach to Dinner in the “Sophienkeller” (Dresden center)  
     
JUNE 21th (Thursday)  
Session K, Chair: W.Lennard  
9.30 – 10.00 MEIS Investigation of 3-dimensional Holmium Silicide Grown on Si(100).  
  T J Wood, C Bonet, T. C. Q. Noakes, P. Bailey and S. P. Tear  
10.00 - 10.30 Deuterium on Palladium - Work in Progress  
  J.O´Connor  
10.30 – 11.00  COFFEE BREAK  
Session L, Chair: A. Bergmaier  
11.00 – 11.45 Depth profiling with high-resolution RBS: comparison and combination with other analytical techniques  
  K. Kimura, K. Nakajima,H. Nohira, T. Hattori,T. Conard and  W. Vandervorst  
11.45 – 12.30 High resolution RBS/channeling measurements of Si strain distributions below ITO and CuO ultrathin films  
  T. Osipowicz, P. Malar, T.K. Chan and B. Ho  
12:30 - 12.40   Closing  
12.40 – 14.00  LUNCH  
     
     


contact: Rainer Grötzschel (r.groetzschel@fzd.de)