Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

2 Publications
Oxygen gettering in the initial stage of SIMOX process
Ou, X.; Kögler, R.; Mücklich, A.; Skorupa, W.; Möller, W.; Wang, X.;
The presentation reported latest results about defect engineering of the SIMOX process
Keywords: Silicon, Oxygen, SIMOX, SOI
  • Lecture (Conference)
    16th International Conference on Ion Beam Modification of Materials (IBMM 2008), 31.08.-05.09.2008, Dresden, Germany
  • Poster
    16th International Conference on Ion Beam Modification of Materials (IBMM 2008), 31.08.-05.09.2008, Dresden, Germany

Publ.-Id: 11880 - Permalink