Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Theoretical description of high-temperature implantation of 6H-SiC with N+-and Al+-ions
Kulikov, D. V.; Trushin, Y. V.; Yankov, R. A.; Pezoldt, J.; Skorupa, W.;
  • Techn. Phys. Lett. 24 (1998) 17

Publ.-Id: 2165 - Permalink