Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Studies of buried (SiC)1-x(AIN)x layers formed by co-implantation of N+ and Al+ ions into 6H-SiC
Pezoldt, J.; Yankov, R. A.; Voelskow, M.; Brauer, G.; Anwand, W.; Heera, V.; Skorupa, W.; Coleman, P.;
  • Contribution to external collection
    Proc. 7th Int. Conf. Defect Recognition and Image Processing of Semicond. (DRIP VII) Inst. Phys. Conf. Ser. No. 160 (1998) IOP Publ. Ltd. Bristol, 1998, 335

Publ.-Id: 2177 - Permalink