Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Distribution of gettering centres at a buried amorphous layer in Si
Kögler, R.; Eichhorn, F.; Mücklich, A.; Skorupa, W.; Danilin, A.;
  • Lecture (Conference)
    11th Int. Conf. on Ion Beam Modification of Materials, Amsterdam,The Netherlands, Aug. 31 - Sept. 4, 1998

Publ.-Id: 2239 - Permalink