Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Investigation of the effects of high temperature implantation and post implantation annealing on the electrical behaviour of nitrogen implanted $-SiC films
Reichert, W.; Lossy, R.; Gonzalez Sirgo, M.; Obermeier, E.; Skorupa, W.;
  • Diam. Relat. Mater. 6 (1997) 1445

Publ.-Id: 2340 - Permalink