Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Plasma immersion ion implantation of 3D-Objects
Mändl, S.; Günzel, R.; Möller, W.;
  • Lecture (Conference)
    8th German Meeting on Plasma Technology, Dresden, Germany, Sept. 15 – 17, 1997

Publ.-Id: 2423 - Permalink