Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Direct measurements of high-energy secondary electrons during plasma immersion ion implantation
Nakamura, K.; Mändl, S.; Brutscher, J.; Günzel, R.; Möller, W.;
  • Lecture (Conference)
    3rd Int. Conf. Reactive Plasmas, Nara, Japan, Jan. 21 - 24, 1997

Publ.-Id: 2435 - Permalink