Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Detection of metastable defective regions in ion-implanted Si by means of metal gettering

Kögler, R.; Posselt, M.; Yankov, R. A.; Kaschny, J. R.; Werner, P.; Danilin, A. B.; Skorupa, W.
  • Contribution to external collection
    MRS Symp. Proc. 469 (1997) 224

Permalink: https://www.hzdr.de/publications/Publ-3099
Publ.-Id: 3099