Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

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Elsherif, A. G. A.; Koehler, N.; Liedke, M. O.; Butterling, M.; Hirschmann, E.; Ecke, R.; Schulz, S. E.; Wagner, A.

Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy

Keywords: PALS, FTIR, ULK, Curing

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Thermal kinetics of free volume in porous spin-on … (Id 31402) has used this (Id 31002) publication of HZDR-primary research data

Reseach data in the HZDR data repository RODARE
Publication date: 2020-05-11
DOI: 10.14278/rodare.321
License: CC-BY-4.0

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Permalink: https://www.hzdr.de/publications/Publ-31002
Publ.-Id: 31002