Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, A. G. A.; Koehler, N.; Liedke, M. O.; Butterling, M.; Hirschmann, E.; Ecke, R.; Schulz, S. E.; Wagner, A.

Data to ULK-kinetics by Positron annihilation spectroscopy and Fourier transform infrared spectroscopy

Keywords: PALS, FTIR, ULK, Curing

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  • Reseach data in the HZDR data repository RODARE
    Publication date: 2020-05-11
    DOI: 10.14278/rodare.321
    License: CC-BY-4.0


Publ.-Id: 31002