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Thermal kinetics of free volume in porous spin-on dielectrics: exploring the network- and pore-properties

Elsherif, A. G. A.; Koehler, N.; Liedke, M. O.; Butterling, M.; Hirschmann, E.; Ecke, R.; Schulz, S. E.; Wagner, A.

Keywords: PALS; FTIR; ULK; Curing

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• Thermal kinetics of free volume in porous spin-on dielectrics: exploring the …
  ROBIS: 31402 has used this (Id 31002) publication of HZDR-primary research data

• Reseach data in the HZDR data repository RODARE
  Publication date: 2020-05-11 Open access
  DOI: 10.14278/rodare.321
  Versions: 10.14278/rodare.322
  License: CC-BY-4.0

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• Veröffentlichung im HZDR-Daten-Repository RODARE - Id 321

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Publ.-Id: 31002