Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

3 Publications

Monte Carlo ion-implantation simulation for deep ULSI transistors

Feudel, T.; Strecker, N.; Krause, U.; Schmidt, B.; Posselt, M. Keywords: .
  • Lecture (Conference)
    Proc. 1999 Semiconductor TCAD Workshop, vol. 2, p. 7. 1, Hsinchu, Taiwan, May 1999
  • Lecture (Conference)
    1999 Semiconductor TCAD Workshop, Hsinchu, Taiwan, May 4-6,1999
  • Contribution to proceedings
    Proc. 1999 Semiconductor TCAD Workshop, vol. 2, p. 7. 1, Hsinchu, Taiwan, May 1999

Permalink: https://www.hzdr.de/publications/Publ-3126
Publ.-Id: 3126