Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

2 Publications

Simulations for impurity gettering in silicon by ion implantation induced defects

Heinig, K.-H.; Jäger, H.-U.
  • Lecture (Conference)
    Proc. First ENDEASD (European Network on Defect Engineering of Advanced Semiconductor Devices) Workshop, C. Claeys, (ed.), p. 294, Santorini, Greece, April 1999
  • Contribution to proceedings
    Proc. First ENDEASD (European Network on Defect Engineering of Advanced Semiconductor Devices) Workshop, C. Claeys, (ed.), p. 294, Santorini, Greece, April 1999

Permalink: https://www.hzdr.de/publications/Publ-3127
Publ.-Id: 3127