Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Computer simulation of defect evolution during high-energy ion implantation and subsequent annealing

Heinig, K.-H.; Jäger, H.-U.
  • Lecture (Conference)
    IUMRS-ICAM99 Conference, Symposium M: Si-based Materials and Devices, Beijing, China, June 13- 18, 1999

Permalink: https://www.hzdr.de/publications/Publ-3146
Publ.-Id: 3146