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Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration: Figs. 1a, 1b and 5

Engelmann, H.-J.
Project Leader: von Borany, Johannes

Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars

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  • Reseach data in the HZDR data repository RODARE
    Publication date: 2021-02-09
    DOI: 10.14278/rodare.806
    License: CC-BY-4.0

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Permalink: https://www.hzdr.de/publications/Publ-32276
Publ.-Id: 32276