Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration:  Figs. 1a, 1b and 5

Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Total number to be selected: 1 Title record

1 Publication

Engelmann, H.-J.
Project Leader: von Borany, Johannes

Energy-filtered transmission electron microscopy (EFTEM) images of stacked Si/SiO2/Si nanopillars

Related publications

Sub-20 nm multilayer nanopillar patterning for hybrid … (Id 32129) has used this (Id 32276) publication of HZDR-primary research data

Reseach data in the HZDR data repository RODARE
Publication date: 2021-02-09
DOI: 10.14278/rodare.806
License: CC-BY-4.0

Downloads:

Permalink: https://www.hzdr.de/publications/Publ-32276
Publ.-Id: 32276