Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

2 Publications

Sheath Dynamics in Plasma Immersion Ion Implantation

Brutscher, J.; Günzel, R.; Möller, W.
  • Plasma Sources Science and Technology 5 (1996) pp. 54-60
  • Surface & Coatings Technology 85 (1996) pp. 98-104

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Permalink: https://www.hzdr.de/publications/Publ-373
Publ.-Id: 373