Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Mechanical properties and characterisation of very thin CNx films synthesised by an IBAD process
Malkow, T.; Arce-Garcia, I.; Kolitsch, A.; Schneider, D.; Bull, S. J.; Page, T. F.;
Nanoindentation techniques have been used to investigate the mechanical properties such as hardness and Young's modulus of carbon nitride films deposited on Si (111) substrates using Ion Beam Assisted Deposition (IBAD) process with varying the deposition parameter. For the lower and higher deposition temperatures, two different types of load displacements behaviour of the loading regime has been found. At a certain temperature limit, the elastic modulus values are dropping significantly down. To estimate the film-only properties of these composites, a simple energy model has been used. For comparison, a Hertzian contact analysis of the load-displacement curves at low loads and direct modulus measurements by laser sound velocity technique were performed. The film thickness was estimated using optical profilometry and the nitrogen content of these films was determined using Electron Energy Loss Spectroscopy (EELS), X-ray induced Photoelectron Spectroscopy (XPS) and Elastic Recoil Detection Analysis (ERDA) techniques. The highest nitrogen content at deposition temperatures between 200 and 400 °C occurs for a Nitrogen-to-Carbon (N/C) transport ratio of 1.2. The film microstructure investigated, using Transmission Electron Microscopy/Selected Area Electron Diffraction (TEM/SAD) exhibits more crystallinity at higher deposition temperatures.
Keywords: carbon nitride, CNx, ion beam assisted deposition, IBAD, nanoindentation, hardness, elastic modulus
  • Diamond and Related Materials 10 (2001) 2199

Publ.-Id: 4928 - Permalink