Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Plasma source ion implantation of oxygen and nitrogen in aluminum

Günzel, R.; Wieser, E.; Richter, E.; Steffen, H. J.
  • Journal of Vacuum Science and Technology Part B 12 (1994) 2

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Permalink: https://www.hzdr.de/publications/Publ-593
Publ.-Id: 593