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Focused ion beam system with high current density

Bischoff, L.; Hesse, E.; Janssen, D.; Naehring, F.; Nötzold, F.; Schmidt, G.; Teichert, J.
The project of the IMSA-100 focused ion beam system is presented. The main goal of the system is to archieve an ion current density > 10 A/cm2. The ion-optical column consists of a liquid metal ion source, two electrostatic lences, beam blanking plates, and two octupole stigmators. A lithium ion source has been developed.
  • Microelectronic Engineering 13 (1991) pp. 367-370


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Publ.-Id: 601