Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
|Total number to be selected: 1 Title record|
Study of the ion-acoustic effect using focused ion beamsTeichert, J.; Bischoff, L.; Köhler, B.
Acoustic waves induced by an intensity-modulated focused
ion beam (FIB) have been measured. The experiments were performed with
Ga+ ions of 35 keV at a current of 3 nA and variable chopping frequency
up to 10 MHz. The acoustic signals were detected by means of a piezoelectric
sensor with integrated pre-amplifier. A dependence on the sample material
was found. The results suggest that the ion-acoustic effect can be utilized
for imaging and material characterization of surface and subsurface structures
in FIB systems.
Proc. bei MRS Fall Meeting, Boston, Dez. 1996
- MRS Symp. Proc. 438 (1997) 453