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2 Publications

TEM-Investigation of Si(001) Modified by Pr Implantation

Mücklich, A.; Kögler, R.; Eichhorn, F.
TEM-Investigation of Si(001) Modified by Pr Implantation
Keywords: high-K dielectrics, Pr oxide, Pr silicide, Pr silicate
  • Poster
    Microscopy Conference, 28.08.-02.09.2005, Davos, Schweiz
  • Contribution to proceedings
    Microscopy Conference 2005, 28.08.-02.09.2005, Davos, Switzerland

Permalink: https://www.hzdr.de/publications/Publ-7592
Publ.-Id: 7592