Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Plasma immersion ion implantation: Process, promises and prospects
Möller, W.;
no abstract available
  • Invited lecture (Conferences)
    15th International Colloquium on Plasma Processes, 05.-09.06.05, Autrans, France

Permalink: https://www.hzdr.de/publications/Publ-8296
Publ.-Id: 8296