Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Detection of metastable defective regions in ion-implanted Silicon by means of metall gettering
Kögler, R.; Posselt, M.; Yankov, R. A.; Kaschny, J.; Mücklich, A.; Skorupa, W.; Danilin, A. B.;
  • Lecture (Conference)
    MRS '97, Spring Meeting, San Francisco, March 31-April 4, 1997

Publ.-Id: 856 - Permalink