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Implantation and growth of large Beta-FeSi2 precipitates and Alpha-FeSi2 network structures in silicon

Reuther, H.; Dobler, M.
  • Applied Physics Letters 69 (1996) 21 pp. 3176-3178

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Permalink: https://www.hzdr.de/publications/Publ-874
Publ.-Id: 874