Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Investigation of the damage induced by 200 keV Ge+ ion implantation in 6H-SiC
Pacaud, Y.; Skorupa, W.; Perez-Rodriguez, A.; Brauer, G.; Stoemenos, J.; Barklie, R.;
  • Nuclear Instruments and Methods in Physics Research B 112 (1996) pp. 321-324

Publ.-Id: 890 - Permalink