Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Role of hydrogen ions in plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry

von Keudell, A.; Jacob, W.; Fukarek, W.
  • Applied Physics Letters 66 (1995) 11 pp. 1322-1324

Downloads:

  • available with HZDR-Login

Permalink: https://www.hzdr.de/publications/Publ-891
Publ.-Id: 891