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Electrical and optical characterisation of double SIMOX structures formed by sequential high energy oxygen implantation into silicon

Hatzopoulos, N.; Panknin, D.; Fukarek, W.; Skorupa, W.; Siapkas, D. I.; Hemment, P. L. F.
  • Microelectronic Engineering 28 (1995) pp.415-418

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Permalink: https://www.hzdr.de/publications/Publ-894
Publ.-Id: 894