Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Electrical and optical characterisation of double SIMOX structures formed by sequential high energy oxygen implantation into silicon
Hatzopoulos, N.; Panknin, D.; Fukarek, W.; Skorupa, W.; Siapkas, D. I.; Hemment, P. L. F.;
  • Microelectronic Engineering 28 (1995) pp.415-418

Publ.-Id: 894 - Permalink