Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Deposition of tetrahedral hydrogenated amorphous carbon using a novel Elecron Cyclotron Wave Resonance reactor

Weiler, M.; Lang, K.; Li, E.; Robertson, J.
  • Applied Physics Letters Volume 72, Number 11, pp 1314-1316

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Permalink: https://www.hzdr.de/publications/Publ-911
Publ.-Id: 911