Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Roughness Improvement and Hardness Enhancement in Nanoscale Al/AlN Multilayered Thin Films

Wang, X.; Kolitsch, A.; Möller, W.
  • Applied Physics Letters, 71 (14), 6 October 1997, 1951-1953

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Permalink: https://www.hzdr.de/publications/Publ-922
Publ.-Id: 922