Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

PC driven etching system for emitter needle tips

Pilz, W.; Lange, H.; Akhmadaliev, C.; Zimmermann, L.; Bischoff, L.
The reproducible forming of emitter needle tips is a serious demand for the fabrication of liquid metal ion sources. The movement of the needle into the etch solution, for tungsten 1n NaOH is used, a PC driven step motor with an increment of 2 µm is used. Due to the adjustment of the motion as a function of height and time the optimum shape of the tip can be repeatable etched. This process is controlled on a monitor optically using a long distance microscope and a video system. Characteristic needle tips with a radius of a few micron are presented.
Keywords: emitter needle; liquid metal ion source; etching; PC control
  • Invited lecture (Conferences)
    1st Workschop on Ion Beams from L.M.I.S. and Applications, 03.12.06, Lamia, Greece

Permalink: https://www.hzdr.de/publications/Publ-9259
Publ.-Id: 9259