Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication

Sheath and Presheath Dynamics in Plasma Immersion Ion Implantation

Mändl, S.; Günzel, R.; Möller, W.
  • Journal of Physics D: Applied Physics 31 (1998) 1109-1117

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Permalink: https://www.hzdr.de/publications/Publ-940
Publ.-Id: 940