Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
The prototype of the new flash lamp apparatus: experiences, results, comparison old and new equipment
Anwand, W.;
The prototype of the new flash lamp apparatus is discussed and compared with the old equipment. First experiences and results are reported.
Keywords: flash lamp annealing, semiconductor processing
  • Lecture (others)
    EU-Projekttreffen FLASiC, 15.10.2004, Ilmenau, Deutschland

Publ.-Id: 9894 - Permalink