Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)
Ferro, G.; Panknin, P.; Polychroniadis, E. K.; Monteil, Y.; Skorupa, W.; Stoemenos, J.;
Microstructural characterization of 3C-SiC thin films epitaxially formed by the flash lamp process (FLASIC)
Keywords: flash lamp, annealing, SiC
  • Lecture (Conference)
    5th Europ. Conf. Silicon Carbide and Related Materials, 31.08.-04.09.2004, Bologna, Italy

Publ.-Id: 9906 - Permalink