Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

1 Publication
Optical and microstructural properties of doubly implanted SiO2 layers using combined Ge-Si implantation
Prucnal, S.; Cheng, X. Q.; Sun, J. M.; Kögler, R.; Zuk, J.; Skorupa, W.;
The optical and microstructural properties of doubly implanted SiO2 layers fabicated combined Ge-Si implantation are investigated.
Keywords: optical properties, defects, microstucture, SiO2, implantation
  • Lecture (Conference)
    5th Int. Conf. on Ion Implantation and other Applications of Ions and Electrons (ION2004), 14.-17.06.2004, Kazimierz Dolny, Poland

Publ.-Id: 9918 - Permalink