Study of Ion Beam Assisted Deposition of Al/AlN Multilayers by Comparison of Computer Simulation and Experiment
Study of Ion Beam Assisted Deposition of Al/AlN Multilayers by Comparison of Computer Simulation and Experiment
Wang, X.; Charlamov, V.; Kolitsch, A.; Posselt, M.; Trushin, Y.; Möller, W.
- Journal of Physics D: Applied Physics 31 (1998) 2241-2244
Permalink: https://www.hzdr.de/publications/Publ-1178
Publ.-Id: 1178
