Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf

Gettering of Iron and Oxygen in Helium-Implanted Czochralski (CZ) and Float-Zone (FZ) Silicon

Yankov, R. A.; Kaschny, J. R.; Fichtner, P. F. P.; Mücklich, A.; Kreißig, U.; Danilin, A. B.; Skorupa, W.

• Poster
  E-MRS 98, Strasbourg, June 16-19, 1998

Permalink: https://www.hzdr.de/publications/Publ-1179
Publ.-Id: 1179