Atomistic simulation of ion-erosion-induced surface patterning


Atomistic simulation of ion-erosion-induced surface patterning

Numazawa, S.; Posselt, M.; Heinig, K.-H.

Kinetic 3D lattice Monte-Carlo simulation of ion beam induced surface modification was performed for f.c.c. (100) surface and preliminary Crystal-TCAS calculations of 5keV As+ on Si(001) have been simulated. By KMC, the observed surface patterning was depending on the incidence angle even the direction of ion-induced surface atom displacement is arbitrary next lattice position. Angular dependency of the sputtering yield by the Crystal-TCAS calculation has been studied.

Keywords: TRIM; Kinetic Monte-Carlo; nanopatterninig

  • Lecture (others)
    Seminar of DFG project FOR845, 06.-07.05.08, M├╝nster, Germany

Permalink: https://www.hzdr.de/publications/Publ-12498
Publ.-Id: 12498